Low-temperature plasma-deposited silicon epitaxial films: Growth and properties

Bénédicte Demaurex*, Richard Bartlome, Johannes P. Seif, Jonas Geissbühler, Duncan T.L. Alexander, Quentin Jeangros, Christophe Ballif, Stefaan De Wolf

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

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