Low pull-in voltage electrostatic MEMS switch using liquid dielectric

Mohammed A. Zidan, Jürgen Kosel, Khaled N. Salama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

In this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.
Original languageEnglish (US)
Title of host publication2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages169-172
Number of pages4
ISBN (Print)9781479941346; 9781479941346
DOIs
StatePublished - Aug 2014

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