High performance flexible electronics promise innovative future technology for various interactive applications for the pursuit of low-cost, light-weight, and multi-functional devices. Thus, here we show a complementary metal oxide semiconductor (CMOS) compatible fabrication of flexible metal-oxide-semiconductor capacitors (MOSCAPs) with high-κ/metal gate stack, using a physical vapor deposition (PVD) cost-effective technique to obtain a high-quality Ge channel. We report outstanding bending radius ~1.25 mm and semi-transparency of 30%.
|Original language||English (US)|
|Number of pages||7|
|Journal||physica status solidi (RRL) - Rapid Research Letters|
|State||Published - Jun 16 2014|
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics