Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof

Mohammed A. Zidan (Inventor), Jürgen Kosel (Inventor), Khaled N. Salama (Inventor)

Research output: Patent

Abstract

A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.
Original languageEnglish (US)
Patent numberUS20180174788A1
StatePublished - Jun 21 2018

Fingerprint Dive into the research topics of 'Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof'. Together they form a unique fingerprint.

Cite this