Laser-assisted growth of diamond particulates on a silicon surface from a cyclohexane liquid

Y. F. Lu*, S. M. Huang, Xianbin Wang, Z. X. Shen

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    50 Scopus citations

    Abstract

    Excimer laser irradiation of a single-crystalline silicon surface immersed under cyclohexane liquid is demonstrated to form diamond particulates. Scanning electron microscopy and Raman spectroscopy have been used to study the deposited particulates. A mechanism based on the condensation of energetic carbon atoms into diamond-like films is proposed to explain the process.

    Original languageEnglish (US)
    Pages (from-to)543-547
    Number of pages5
    JournalApplied Physics A: Materials Science and Processing
    Volume66
    Issue number5
    DOIs
    StatePublished - Jan 1 1998

    ASJC Scopus subject areas

    • Chemistry(all)
    • Materials Science(all)

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