Excimer laser irradiation of a single-crystalline silicon surface immersed under cyclohexane liquid is demonstrated to form diamond particulates. Scanning electron microscopy and Raman spectroscopy have been used to study the deposited particulates. A mechanism based on the condensation of energetic carbon atoms into diamond-like films is proposed to explain the process.
|Original language||English (US)|
|Number of pages||5|
|Journal||Applied Physics A: Materials Science and Processing|
|State||Published - Jan 1 1998|
ASJC Scopus subject areas
- Materials Science(all)