Large Area Deposition of MoS2 by Pulsed Laser Deposition with In-Situ Thickness Control

Martha I. Serna, Seong H. Yoo, Salvador Moreno, Yang Xi, Juan Pablo Oviedo, Hyunjoo Choi, Husam N. Alshareef, Moon J. Kim, Majid Minary-Jolandan, Manuel A. Quevedo-Lopez

Research output: Contribution to journalArticlepeer-review

131 Scopus citations

Abstract

A scalable and catalyst-free method to deposit stoichiometric Molybdenum Disulfide (MoS2) films over large areas is reported with the maximum area limited by the size of the substrate holder. The method allows deposition of MoS2 layers on a wide range of substrates without any additional surface preparation including single crystals (sapphire and quartz), polycrystalline (HfO2), and amorphous (SiO2). The films are deposited using carefully designed MoS2 targets fabricated with excess of sulfur (S) and variable MoS2 and S particle size. Uniform and layered MoS2 films as thin as two monolayers, with an electrical resistivity of 1.54 × 104 Ω cm-1 were achieved. The MoS2 stoichiometry was as confirmed by High Resolution Rutherford Backscattering Spectrometry (HRRBS). With the method reported here, in situ graded MoS2 films ranging from ~1 to 10 monolayers can also be deposited.
Original languageEnglish (US)
Pages (from-to)6054-6061
Number of pages8
JournalACS Nano
Volume10
Issue number6
DOIs
StatePublished - May 31 2016

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