Investigation on the mechanism of the leakage failure between poly gate and contact in subnano technology

Q. F. Wang, S. L. Toh, Q. Deng, P. K. Tan, Kun Li, J. Teong, Z. H. Mai, J. Lam

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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Engineering & Materials Science