Investigation of the effect of nonlinearities on the response of cantilever microbeams under mechanical shock and electrostatic loading

Mohammad Younis, Haider N. Arafat

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We present an investigation into the effect of nonlinearities on the response of cantilever microbeams under mechanical shock and electrostatic loading. The nonlinear Euler-Bernoulli beam theory is used to model the microbeam, accounting for cubic geometric and inertia nonlinearities, in addition to the nonlinear electrostatic forces in the case of electrostatic actuation. The influences of the different components of nonlinearity are examined. The results of the nonlinear model are compared to results obtained from linear beam theory and finite-element simulations (ANSYS). For mechanical shock loading, both quasi-static and dynamic responses of a microbeam are considered. The effect of nonlinearity is found to be significant when the deflection of the microbeam exceeds around 30% of its length. The consequence of the large deflection is that the geometric nonlinearity has a much stronger influence on the response in comparison to the inertia nonlinearity. For electrostatic actuation, it is found that using a nonlinear beam model to predict the pull-in and the deflection produces a slight improvement over using a linear beam model.

Original languageEnglish (US)
Title of host publicationSociety for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
Pages2067-2072
Number of pages6
StatePublished - Dec 22 2008
Event11th International Congress and Exhibition on Experimental and Applied Mechanics 2008 - Orlando, FL, United States
Duration: Jun 2 2008Jun 5 2008

Publication series

NameSociety for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
Volume4

Other

Other11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
CountryUnited States
CityOrlando, FL
Period06/2/0806/5/08

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials

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