Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

Karim M. Masri, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.
Original languageEnglish (US)
Title of host publicationVolume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
PublisherASME International
ISBN (Print)9780791846391
DOIs
StatePublished - Aug 17 2014

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