This study presents a new geomorphological approach to investigate the past activity and potential seismic hazard of upper crustal faults at the Salar del Carmen segment of the Atacama Fault System in the northern Chile forearc. Our contribution is based on the analysis of a large set of topographic profiles and allows extrapolating fault analysis from a few selected locations to distances of kilometers along strike of the fault. We detected subtle changes in the fault scarp geometry which may represent the number of paleoearthquakes experienced by the structure and extracted the cumulative and last incremental displacement along strike of the investigated scarps. We also tested the potential of knickpoints in channels crossing the fault scarps as markers for repeated fault rupture and proxies for seismic displacement. The number of paleoearthquakes derived from our analysis is 2-3, well in agreement with recent paleoseismological investigations, which suggest 2-3 earthquakes (Mw = 6.5-6.7) at the studied segments. Knickpoints record the number of events for about 55% of the analyzed profile pairs. Only few knickpoints represent the full seismic displacement, while most retain only a fraction of the displacement. The along-strike displacement distributions suggest fault growth from the center toward the tips and linkage of individual ruptures. Our approach also improves the estimation of paleomagnitudes in case of multiple fault rupture by allowing to quantify the last increment of displacement separately. Paleomagnitudes calculated from total segment length and the last increment of displacement (Mw = 6.5-7.1) are in agreement with paleoseismological results.