Integration of thin film giant magnetoimpedance sensor and surface acoustic wave transponder

Bodong Li, Nedime Pelin M. H. Salem, Ioanna Giouroudi, Jürgen Kosel

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

Passive and remote sensing technology has many potential applications in implantable devices, automation, or structural monitoring. In this paper, a tri-layer thin film giant magnetoimpedance (GMI) sensor with the maximum sensitivity of 16%/Oe and GMI ratio of 44% was combined with a two-port surface acoustic wave(SAW) transponder on a common substrate using standard microfabrication technology resulting in a fully integrated sensor for passive and remote operation. The implementation of the two devices has been optimized by on-chip matching circuits. The measurement results clearly show a magnetic field response at the input port of the SAW transponder that reflects the impedance change of the GMI sensor.
Original languageEnglish (US)
Pages (from-to)07E514
JournalJournal of Applied Physics
Volume111
Issue number7
DOIs
StatePublished - Mar 10 2012

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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