Integration of high-k gate stack systems into planar CMOS process flows

H. R. Huff, A. Agarwal, Youngjin Kim, L. Perrymore, D. Riley, J. Barnett, C. Sparks, M. Freiler, G. Gebara, B. Bowers, Peng Chen, P. Lysaght, B. Nguyen, Jungah Lim, S. Lim, G. Bersuker, P. Zeitzoff, Graham Brown, C. Young, B. ForanF. Shaapur, A. Hou, C. Lim, Husam Niman Alshareef, S. Borthakur, D. J. Derro, R. Bergmann, L. A. Larson, M. I. Gardner, J. Gutt, R. W. Murto, K. Torres, Marc Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

18 Scopus citations

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