Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

Darius Viržonis, Rimantas Kodzius, Galius Vanagas

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Abstract

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin
    Original languageEnglish (US)
    Title of host publicationMicrofluidics: Control, Manipulation and Behavioral Applications
    PublisherNova Science Publishers
    ISBN (Print)978-1-62417-345-5
    StatePublished - Oct 22 2013

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