Integration challenges and opportunities for nanometer scale dual metal gate CMOSFET

S. C. Song, Muhammad Mustafa Hussain, J. Barnett, C. S. Park, C. Park, P. Kirsch, B. H. Lee, R. Jammy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

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Engineering & Materials Science