This paper presents a surface acoustic wave-based passive and wireless sensor that can measure magnetic field, temperature and humidity. A thin film giant magnetoimpedance sensor, a thermally sensitive LiNbO3 substrate and a humidity sensitive hydrogel are integrated together with a surface acoustic wave transducer to realize the multifunctional sensor. The device is characterized using a network analyzer under sequentially changing humidity, temperature and magnetic field conditions. The first hand results show the sensor response to all three sensing parameters with small temperature interference on the magnetic signals. © 2013 IEEE.
|Original language||English (US)|
|Title of host publication||2013 IEEE SENSORS|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|State||Published - Nov 2013|