Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment

Shahid Saghir, Mohammed Lamine Faycal Bellaredj, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.
Original languageEnglish (US)
Title of host publicationVolume 8: 28th Conference on Mechanical Vibration and Noise
PublisherASME International
ISBN (Print)9780791850206
DOIs
StatePublished - Dec 5 2016

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