Influence of the manufacturing process on the electrical properties of thin (

M. Lanza, M. Porti, M. Nafria, G. Benstetter, W. Frammelsberger, H. Ranzinger, E. Lodermeier, G. Jaschke

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Abstract

In this work, the dependence of the electrical characteristics of some thin (
Original languageEnglish (US)
Pages (from-to)1424-1428
Number of pages5
JournalMicroelectronics Reliability
Volume47
Issue number9-11 SPEC. ISS.
DOIs
StatePublished - Aug 1 2007
Externally publishedYes

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Condensed Matter Physics

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