In-line control and rapid process development of nitrided gate oxides

Duncan Rogers*, Tapani Laaksonen, Ajith Varghese, Christian Otten, Mike Kasner, Husam Alshareef, Richard Kuan, Malcolm Bevan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint

Dive into the research topics of 'In-line control and rapid process development of nitrided gate oxides'. Together they form a unique fingerprint.

Physics & Astronomy