Emphasizing the Vertical-Cavity Surface-Emitting Laser (VCSEL) device packaging, fan-pad metallization and trench patterning are demonstrated for VCSEL operating at 850 nm of the electromagnetic spectrum. The fabricated devices are observed to exhibit low threshold current and series resistance, contributing thereby to higher VCSEL efficiency. It is also observed that the output spectral characteristics of the fabricated device show stable multimode operation. The results indicate that the proposed VCSEL packaging exhibits superior device performance as compared to the VCSEL device packaged with square-pad metal.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Industrial and Manufacturing Engineering