Hysteresis spring single digital input bistable mechanism

Ian G. Foulds*, M. Parameswaran

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents the first reported microfabricated single digital input bistable MEMS mechanism. The bistable mechanism is an important building block for many MEMS. Applications of bistable mechanisms include optical switches, microrelays and motor transmissions. Current literature contains examples of dual digital input and single analog input bistable mechanisms; however, no single digital input bistable mechanisms have yet been reported. This work develops the hysteresis spring as an enabling mechanism to allow the creation of the first reported single digital input bistable mechanism. The functionality of the hysteresis spring single digital input bistable mechanism is described and an analytical model is developed. The analytical model is shown to agree with experimental results. The proof of concept design has been fabricated and the prescribed functionality has been shown experimentally.

Original languageEnglish (US)
Title of host publicationProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Pages455-458
Number of pages4
DOIs
StatePublished - 2005
Externally publishedYes
Event2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada
Duration: Jul 24 2006Jul 27 2006

Other

Other2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
CountryCanada
CityBanff, Alberta
Period07/24/0607/27/06

Keywords

  • Bistable
  • MEMS
  • PolyMUMPS
  • Single Input
  • Surface Micromachining Technology

ASJC Scopus subject areas

  • Engineering(all)

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