Highly manufacturaba 45nm LSTP CMOSFETs using novel dual high-k and dual metal gate CMOS integration

S. C. Song, Z. B. Zhang, Muhammad Mustafa Hussain, C. Huffman, J. Barnett, S. H. Bae, H. J. Li, P. Majhi, C. S. Park, B. S. Ju, H. K. Park, C. Y. Kang, R. Choi, P. Zeitzoff, H. H. Tseng, B. H. Lee, R. Jammy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

43 Scopus citations

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Engineering & Materials Science