High-Throughput Near-Field Optical Nanoprocessing of Solution-Deposited Nanoparticles

Heng Pan, David J. Hwang, Seung H. Ko, Tabitha A. Clem, Jean M. J. Fréchet, Dieter Bäuerle, Costas P. Grigoropoulos

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39 Scopus citations

Abstract

The application of nanoscale electrical and biological devices will benefit from the development of nanomanufacturing technologies that are highthroughput, low-cost, and flexible. Utilizing nanomaterials as building blocks and organizing them in a rational way constitutes an attractive approach towards this goal and has been pursued for the past few years. The optical near-field nanoprocessing of nanoparticles for high-throughput nanomanufacturing is reported. The method utilizes fluidically assembled microspheres as a near-field optical confinement structure array for laserassisted nanosintering and nanoablation of nanoparticles. By taking advantage of the low processing temperature and reduced thermal diffusion in the nanoparticle film, a minimum feature size down to ≈i100nm is realized. In addition, smaller features (50nm) are obtained by furnace annealing of laser-sintered nanodots at 400 °C. The electrical conductivity of sintered nanolines is also studied. Using nanoline electrodes separated by a submicrometer gap, organic field-effect transistors are subsequently fabricated with oxygen-stable semiconducting polymer. © 2010 Wiley-VCH Verlag GmbH and Co. KGaA, Weinheim.
Original languageEnglish (US)
Pages (from-to)1812-1821
Number of pages10
JournalSmall
Volume6
Issue number16
DOIs
StatePublished - Jul 27 2010
Externally publishedYes

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