High performance solution-deposited amorphous indium gallium zinc oxide thin film transistors by oxygen plasma treatment

Pradipta K. Nayak, Mohamed N. Hedhili, Dong Kyu Cha, Husam N. Alshareef

Research output: Contribution to journalArticlepeer-review

85 Scopus citations

Abstract

Solution-deposited amorphous indium gallium zinc oxide (a-IGZO) thin film transistors(TFTs) with high performance were fabricated using O2-plasma treatment of the films prior to high temperature annealing. The O2-plasma treatment resulted in a decrease in oxygen vacancy and residual hydrocarbon concentration in the a-IGZO films, as well as an improvement in the dielectric/channel interfacial roughness. As a result, the TFTs with O2-plasma treated a-IGZO channel layers showed three times higher linear field-effect mobility compared to the untreated a-IGZO over a range of processing temperatures. The O2-plasma treatment effectively reduces the required processing temperature of solution-deposited a-IGZO films to achieve the required performance.
Original languageEnglish (US)
Pages (from-to)202106
JournalApplied Physics Letters
Volume100
Issue number20
DOIs
StatePublished - May 17 2012

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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