Growth mechanism of ALD-TiN and the thickness dependence of work function

K. Choi*, P. Lysaght, Husam Niman Alshareef, H. C. Wen, C. Huffman, R. Harris, H. Luan, K. Matthews, P. Majhi, B. H. Lee

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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