Global dynamics of MEMS resonators under superharmonic excitation

Mohammad I. Younis*, Eihab M. Abdel-Rahman, Ali H. Nayfeh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

We present a methodology to simulate the transient and steady-state dynamics of microbeams undergoing small or large motions actuated by combined DC and AC loads. We use our methodology to simulate the dynamics of MEMS resonators excited near half their fundamental natural frequencies (superharmonic excitation). We present results showing the effect of varying the DC bias, the damping, and the AC excitation amplitude on the frequency-response curves. We show that the dynamic pull-in phenomenon can occur for a superharmonic excitation at an electric load much lower than that predicted based on static analysis.

Original languageEnglish (US)
Title of host publicationProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
EditorsW. Badawy, W. Moussa
Pages694-699
Number of pages6
StatePublished - 2004
Externally publishedYes
EventProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004 - Banff, Alta., Canada
Duration: Aug 25 2004Aug 27 2004

Other

OtherProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
CountryCanada
CityBanff, Alta.
Period08/25/0408/27/04

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint

Dive into the research topics of 'Global dynamics of MEMS resonators under superharmonic excitation'. Together they form a unique fingerprint.

Cite this