Gas-Phase Modification of Polymer Coatings: The Use of Gas-Phase Silylation for Image-Tone Reversal of Chemically Amplified Photoresists Based on Electrophilic Addition Reactions

S. Ming Lee, Stephen Matuszczak, Jean Frechet*, Chester Lee, Yosef Shacham-Diamand

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint Dive into the research topics of 'Gas-Phase Modification of Polymer Coatings: The Use of Gas-Phase Silylation for Image-Tone Reversal of Chemically Amplified Photoresists Based on Electrophilic Addition Reactions'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science