Future Aspects of MOCVD Technology for Epitaxial Growth of Semiconductors

T. Detchprohm, J.-H. Ryou, Xiaohang Li, R.D. Dupuis

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This chapter explores the characteristics of metalorganic chemical vapor deposition (MOCVD) and discusses possible future trends in the development and application of this epitaxial materials technology to future electronic and optoelectronic devices. It focuses on the needs of different III-nitride materials and devices as examples to describe the state-of-the-art and emerging MOCVD technologies. In addition, the chapter discusses MOCVD innovation for emerging related materials such as Ga2O3. The II-VI compound semiconductors discussed in the chapter are formed by the Group 12 elements Zn, Cd, and Hg, and the Group 16 elements S, Se, and Te. Extrapolating from the recent past, it is relatively easy to predict the continued expansion of MOCVD materials grown for both research and commercial applications. The chapter addresses some specific commercial device applications of MOCVD-grown materials.
Original languageEnglish (US)
Title of host publicationMetalorganic Vapor Phase Epitaxy (MOVPE)
PublisherWiley
Pages507-548
Number of pages42
ISBN (Print)9781119313014
DOIs
StatePublished - Aug 30 2019

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