In this paper, fully inkjet printed multilayer capacitors and inductors are fabricated and characterized using poly 4-vinylphenol (PVP) ink as the dielectric layer and silver nanoparticle ink as the conductor. Inkjet printed through vias, created with a novel dissolving method are used to make RF structures in a multilayer inkjet printing process. The vias have been realized in a 350-nm PVP film and exhibit resistance better than 0.1 Ω. Spiral inductors from 10 to 75 nH have been realized with maximum quality factors around five. The 10-nH inductor exhibits a self-resonant frequency slightly below 1 GHz. Metal-insulator-metal capacitors are realized with densities of 50 pF/mm-2. These capacitors demonstrate values ranging from 16 to 50 pF. The 16-pF capacitor shows a self-resonant frequency over 1.5 GHz. The successful implementation of inductors and capacitors in an all inkjet printed multilayer process with vias is an important step toward fully inkjet-printed large area and flexible RF systems.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering