Fractal Structures For Mems Variable Capacitors

Amro M. Elshurafa (Inventor), Ahmed G. Radwan (Inventor), Ahmed Emira (Inventor), Khaled N. Salama (Inventor)

Research output: Patent

Abstract

In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.
Original languageEnglish (US)
Patent numberUS9614024B2
StatePublished - Aug 28 2014

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