An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.
|Original language||English (US)|
|Patent number||US 20140239446 A1|
|IPC||H01G 5/ 01 A I|
|State||Published - Aug 28 2014|