Fractal Structures For Fixed Mems Capacitors

Amro M. Elshurafa (Inventor), Ahmed Gomaa Ahmed Radwan (Inventor), Ahmed A. Emira (Inventor), Khaled N. Salama (Inventor)

Research output: Patent

Abstract

An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.
Original languageEnglish (US)
Patent numberUS 20140239446 A1
IPCH01G 5/ 01 A I
Priority date08/25/11
StatePublished - Aug 28 2014

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