Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

Jr-Hau He*, W. W. Wu, Y. L. Chueh, C. L. Hsin, L. J. Chen, L. J. Chou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

Original languageEnglish (US)
Article number223102
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume87
Issue number22
DOIs
StatePublished - Nov 30 2005

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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