Fluorocarbon resist for high-speed scanning probe lithography

Marco Rolandi*, Itai Suez, Andreas Scholl, Jean Frechet

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Fingerprint

Dive into the research topics of 'Fluorocarbon resist for high-speed scanning probe lithography'. Together they form a unique fingerprint.

Chemical Compounds