Flexible high-κ/Metal gate metal/insulator/metal capacitors on silicon (100) fabric

Jhonathan Prieto Rojas, Mohamed T. Ghoneim, Chadwin Young, Muhammad Mustafa Hussain

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

Implementation of memory on bendable substrates is an important step toward a complete and fully developed notion of mechanically flexible computational systems. In this paper, we have demonstrated a simple fabrication flow to build metal-insulator-metal capacitors, key components of dynamic random access memory, on a mechanically flexible silicon (100) fabric. We rely on standard microfabrication processes to release a thin sheet of bendable silicon (area: 18 {\rm cm}2 and thickness: 25 \mu{\rm m}) in an inexpensive and reliable way. On such platform, we fabricated and characterized the devices showing mechanical robustness (minimum bending radius of 10 mm at an applied strain of 83.33% and nominal strain of 0.125%) and consistent electrical behavior regardless of the applied mechanical stress. Furthermore, and for the first time, we performed a reliability study suggesting no significant difference in performance and showing an improvement in lifetime projections. © 1963-2012 IEEE.
Original languageEnglish (US)
Pages (from-to)3305-3309
Number of pages5
JournalIEEE Transactions on Electron Devices
Volume60
Issue number10
DOIs
StatePublished - Oct 2013

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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