Flexible and semi-transparent thermoelectric energy harvesters from low cost bulk silicon (100)

Galo T. Sevilla, Salman Bin Inayat, Jhonathan Prieto Rojas, Aftab M. Hussain, Muhammad Mustafa Hussain

Research output: Contribution to journalArticlepeer-review

55 Scopus citations

Abstract

Flexible and semi-transparent high performance thermoelectric energy harvesters are fabricated on low cost bulk mono-crystalline silicon (100) wafers. The released silicon is only 3.6% as thick as bulk silicon reducing the thermal loss significantly and generating nearly 30% more output power than unpeeled harvesters. This generic batch processing is a pragmatic way of transforming traditional silicon circuitry for extremely deformable high-performance integrated electronics. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Original languageEnglish (US)
Pages (from-to)3916-3921
Number of pages6
JournalSmall
Volume9
Issue number23
DOIs
StatePublished - Jul 9 2013

ASJC Scopus subject areas

  • Medicine(all)

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