Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm

B. Kaulich*, S. Oestreich, M. Salome, R. Barrett, J. Susini, T. Wilhein, Enzo Di Fabrizio, M. Gentili, P. Charalambous

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Abstract

The feasibility of a transmission x-ray microscope operating in the 3-7 keV photon energy range using phase zone plates (ZPs) has been tested. It has been demonstrated that, at a photon energy of 4 keV, structures smaller than 150 nm can be resolved with good contrast using exposure times in the second to minute range. A large diameter gold ZP was used as condenser and a tungsten ZP with an outermost zone width of 128 nm was used as a high spatial resolution imaging objective lens. Images with a field size of 10×10 μm2 were acquired using a charge coupled device camera optically coupled to a phosphor screen. The corresponding pixel size in the object plane was 70 nm.

Original languageEnglish (US)
Pages (from-to)4061-4063
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number26
DOIs
StatePublished - Dec 1 1999

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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