Fast proximity corrections for electron-beam-fabricated high resolution and high-aspect-ratio fresnel zone plate

Enzo Di Fabrizio*, Luca Grella, Marco Baciocchi, Massimo Gentili, Daniela Peschiaroli, Luigi Mastrogiacomo, Romano Maggiora

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

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