Fabrication of three-dimensional MIS nano-capacitor based on nano-imprinted single crystal silicon nanowire arrays

Yujia Zhai, Marylene Palard, Leo Mathew, Muhammad Mustafa Hussain, Grant Grant Willson, Emanuel Tutuc, Sanjay Kumar Banerjee

    Research output: Contribution to journalArticlepeer-review

    3 Scopus citations

    Fingerprint

    Dive into the research topics of 'Fabrication of three-dimensional MIS nano-capacitor based on nano-imprinted single crystal silicon nanowire arrays'. Together they form a unique fingerprint.

    Physics & Astronomy