Fabrication of SU-8 low frequency electrostatic energy harvester

Khaled S. Ramadan, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

A 1500μm × 1500μm × 150μm out-of-plane, gap closing, electrostatic energy harvester is designed and fabricated to harvest low-frequency ambient vibrations. SU-8 is used to fabricate the proof mass (1200μm × 1200μm × 150μm) and the 5 m springs. Different harvesters were designed to harvest at 50, 75 and 110 Hz. At 110 Hz, Simulations show that with an input vibration of 10 μm amplitude at the frequency of resonance of the structure, the energy harvester should generate an average output power density of 0.032μW/mm3. This is the most area-efficient low-frequency electrostatic harvester to-date. © 2011 IEEE.
Original languageEnglish (US)
Title of host publication2011 International Conference on Energy Aware Computing
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
ISBN (Print)9781467304658
DOIs
StatePublished - Nov 2011

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