In this paper, we report on the first successful fabrication, using spin-coating and low-temperature (200 °C) annealing, of organically modified sol-gel planar optical waveguides on InP substrates. Considering the fact that the sol-gel technique is simple and cheap, and III-V compound semiconductors are the essential substrate materials for manufacturing data communication devices, we believe that our demonstration of optical waveguiding in sol-gel-derived waveguides on III-V compound semiconductors is interesting. It opens the possibility of hybridizating traditional glass or optical-crystal-based integrated optics with III-V compound semiconductor-based optoelectronics.
|Original language||English (US)|
|Number of pages||3|
|Journal||Applied Physics A: Materials Science and Processing|
|State||Published - Dec 1 1999|
ASJC Scopus subject areas
- Materials Science(all)