This study successfully develops a versatile method of producing superhydrophobic surfaces with micro/nano-silica hierarchical structures on glass surfaces. Optically transparent super hydrophobic silica thin films were prepared by spin-coating silica particles suspended in a precursor solution of silane, ethanol, and H2O with molar ratio of 1:4:4. The resulting super hydrophobic films were characterized by scanning electron microscopy (SEM), optical transmission, and contact angle measurements. The glass substrates in this study were modified with different particles: micro-silica particles, nano-silica particles, and hierarchical structures. This study includes SEM micrographs of the modified glass surfaces with hierarchical structures at different magnifications. © 2011 The Korean Society of Mechanical Engineers and Springer-Verlag Berlin Heidelberg.