Fabrication of ridge waveguides from sol-gel derived Nd-doped SiO2-TiO2-Al2O3 glass films

Q. Xiang*, Y. Zhou, Boon Ooi, Y. L. Lam, Y. C. Chan, C. H. Kam

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

Ridge waveguides were fabricated from sol-gel derived Nd-doped SiO2-TiO2-Al2O3 glass films by laser writing lithography and reactive ion etching. The top surface of the ridge is smooth as a result of the Ti-Ni cap protection. However, the side-wall and the etched substrate are much rougher.

Original languageEnglish (US)
Pages (from-to)820-821
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume2
StatePublished - Dec 1 1999
EventProceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) - San Francisco, CA, USA
Duration: Nov 8 1999Nov 11 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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