Fabrication of relaxer-based piezoelectric energy harvesters using a sacrificial poly-Si seeding layer

E. M A Fuentes-Fernandez, A. M. Salomon-Preciado, Bruce E. Gnade, Manuel Angel Quevedo Quevedo-López, Pradeep Shah, Husam N. Alshareef

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The effect of a polycrystalline silicon (poly-Si) seeding layer on the properties of relaxor Pb(Zr0.53,Ti0.47)O3-Pb(Zn1/3,Nb2/3)O3 (PZT-PZN) thin films and energy-harvesting cantilevers was studied. We deposited thin films of the relaxor on two substrates, with and without a poly-Si seeding layer. The seeding layer, which also served as a sacrificial layer to facilitate cantilever release, was found to improve morphology, phase purity, crystal orientation, and electrical properties. We attributed these results to reduction of the number of nucleation sites and, therefore, to an increase in relaxor film grain size. The areal power density of the wet-based released harvester was measured. The power density output of the energy harvester with this relaxor composition and the poly-Si seeding layer was 325 μW/cm2.
Original languageEnglish (US)
Pages (from-to)3898-3904
Number of pages7
JournalJournal of Electronic Materials
Volume43
Issue number11
DOIs
StatePublished - Aug 7 2014

ASJC Scopus subject areas

  • Materials Chemistry
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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