Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off

Weisheng Yue, Zhihong Wang, Xianbin Wang, Longqing Chen, Yang Yang, Basil Chew Joo Siang, Ahad A. Syed, Ka Chun Wong, Xixiang Zhang

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright © 2012 American Scientific Publishers.
Original languageEnglish (US)
Pages (from-to)696-699
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume12
Issue number1
DOIs
StatePublished - Jan 1 2012

ASJC Scopus subject areas

  • Biomedical Engineering
  • Bioengineering
  • Materials Science(all)
  • Chemistry(all)
  • Condensed Matter Physics

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