Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips

Fei Hui, Marc Porti, Montserrat Nafria, Huiling Duan, Mario Lanza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Scanning probe microscopes (SPM) are commonly used for characterization of the topographic and electrical properties of materials at the nanoscale. In such setup, the probes play a prominent role to obtain reliable imaging, but most tips lose their intrinsic properties after some measurements. Here, we modified the metal varnished atomic force microscope tips by transferring a sheet of graphene on them. The resulting graphene micro-electromechanical system (MEMS) - AFM tips are characterized by means of optical microscope, scanning electron microscope (SEM), energy dispersive X-ray microscope (EDX) and atomic force microscope (AFM). Our graphene-coated tips achieved lifetimes 10 times larger than the uncoated counterparts, improving the quality and reducing the cost of research.
Original languageEnglish (US)
Title of host publicationProceedings of the 2015 10th Spanish Conference on Electron Devices, CDE 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479981083
DOIs
StatePublished - Jan 1 2015
Externally publishedYes

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