We have built a freestanding cleanroom module for microsystem testing. The environment has an interior floor space of 4.3 m × 2.1 m and a ceiling of 2.4 m (8 feet). The cleanroom module can be operated as a class 10 000 environment, and the cost of materials was less than CDN$1900. In this paper, we describe the construction and testing of our cleanroom module.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering