Fabrication of an inexpensive cleanroom module for microsystem testing

R. W. Johnstone*, S. H. Tsang, Ian Grant Foulds, S. W. Lee, D. Sameoto, M. Parameswaran

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We have built a freestanding cleanroom module for microsystem testing. The environment has an interior floor space of 4.3 m × 2.1 m and a ceiling of 2.4 m (8 feet). The cleanroom module can be operated as a class 10 000 environment, and the cost of materials was less than CDN$1900. In this paper, we describe the construction and testing of our cleanroom module.

Original languageEnglish (US)
Article numberN01
JournalJournal of Micromechanics and Microengineering
Volume17
Issue number8
DOIs
StatePublished - Aug 1 2007

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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