Fabrication and characterization of magnetic composite membrane pressure sensor

Mohammed Asadullah Khan, Ahmed Alfadhel, Jürgen Kosel, M. Bakolka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

This paper describes a magnetic field powered pressure sensor, which comprises a coil array and a magnetic composite membrane. The composite membrane is made by embedding a ribbon of the amorphous soft magnetic alloy Vitrovac®, in a 17 mm x 25 mm x 1.5 mm Polydimethylsiloxane (PDMS) layer. PDMS is chosen for its low Young's modulus and the amorphous alloy for its high permeability. The membrane is suspended 1.5 mm above a 17x19 array of microfabricated planar coils. The coils are fabricated by patterning a 620 nm thick gold layer. Each coil occupies an area of 36000 μm2 and consists of 14 turns. The sensor is tested by subjecting it to pressure and simultaneously exciting it by a 24 A/m, 100 kHz magnetic field. A pressure change from 0 kPa to 5.1 kPa, results in a 5400 ppm change in the voltage output.
Original languageEnglish (US)
Title of host publication2016 IEEE Sensors Applications Symposium (SAS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages350-354
Number of pages5
ISBN (Print)9781479972500
DOIs
StatePublished - May 30 2016

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