Evaluation and integration of metal gate electrodes for future generation dual metal CMOS

P. Majhi*, H. C. Wen, Husam Niman Alshareef, K. Choi, R. Harris, P. Lysaght, H. Luan, Y. Senzaki, S. C. Song, B. H. Lee, C. Ramiller

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

14 Scopus citations

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Engineering & Materials Science