Electrostatically actuated torsional resonant sensors and switches

Research output: Patent

Abstract

Embodiments in accordance of a torsional resonant sensor disclosure is configured to actuate a beam structure using electrostatic actuation with an AC harmonic load (e.g., AC and DC voltage sources) that is activated upon detecting a particular agent having a mass above a predefined level. In various embodiments, the beam structure may be different types of resonant structures that is at least partially coated or layered with a selective material.
Original languageEnglish (US)
Patent numberWO 2016207834 A1
StatePublished - Dec 29 2016

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