Electrical and structural characterisation of mesoporous silica thin films as humidity sensors

Plinio Innocenzi*, Alessandro Martucci, Massimo Guglielmi, Andrea Bearzotti, Enrico Traversa

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

70 Scopus citations

Abstract

Mesoporous silica thin films have been prepared using a self-assembling process employing cetyltrimethylammonium bromide (CTAB) as the organic template. The films were deposited by dip-coating on silicon and alumina substrates. Thermal treatment at 250 and 450°C was used to remove the organic template. Fourier transformed infra-red spectra demonstrated that calcination is complete at 450°C. Electrical measurements under dry and wet conditions were performed for films deposited on alumina substrates with comb-type gold electrodes. The films showed an increase in current intensity as a function of relative humidity. No memory effects were observed after cyclic testing in dry-wet conditions. Electrical characterisation indicates that the mesophase is easily accessible by the external environment.

Original languageEnglish (US)
Pages (from-to)299-303
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume76
Issue number1-3
DOIs
StatePublished - Jun 1 2001
Externally publishedYes

Keywords

  • Electrical characterisation
  • Humidity sensors
  • Mesoporous silica
  • Self-assembly process
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry
  • Electrical and Electronic Engineering

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