Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

Nizar Jaber, Md Abdullah Al Hafiz, Syed Kazmi, M. H. Hasan, F. Alsaleem, Saad Ilyas, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.
Original languageEnglish (US)
JournalScientific Reports
Volume9
Issue number1
DOIs
StatePublished - Jan 22 2019

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